Ultrasonic MEMS Testing with the AT-AWG-4000 Series Arbitrary Waveform Generator
The AT-AWG-4000 Series Arbitrary Waveform Generator simplifies the generation of pulse and chirp signals that are typically used to perform design tests and characterization of MEMS sensors.
Considering the amplitude of 24 Vpp into High-Impedance (12 Vpp into 50 Ohm) joined to an analog shift of ±12V into High-Impedance, the AWG-4000 Series represents the ideal solution for these kind of tests where high voltage amplitude, programmable pulse’s width and rise/ fall time are mandatory.
Ultrasonic MEMS Testing with the AT-AWG-4000 Series Arbitrary Waveform Generator
MEMS (Micro-Electro-Mechanical systems) sensors leverage silicon’s unique mechanical properties to integrate mechanical structures able to sense acceleration, rotation, angular rate, vibration, displacement, heading, and other physical and environmental properties.
Those considerations united to an analog front end with an excellent harmonic distortion, produce a circuit that combines electrical circuits and 3-dimensional mechanical structures.
Nowadays MEMS sensors and microphones are widely used in many applications starting from the distance and motion detection, mobile, IoT, drones, automotive, pressure measurement, humidity and temperature sensing to just name a few.
Semiconductor and digital imaging companies are investing money and research time into this particular market segment; the market forecast is about 6 Billion USD in 2025.
The AWG-4012/14/18 Arbitrary Waveform Generator Series represents a key-component for the design, test and characterization of next generation Ultrasonic MEMS and components.
The Application Note is available HERE
Ferrara – Italy, 09.08.2021
